February 21, 2013

Leading-edge research at SUNY NanoCollege generates nearly 50 technical papers to be presented at prestigious lithography forum



CNSE and its global corporate partners to showcase innovative technologies at SPIE 2013
Advanced Lithography conference; Professor Alain Diebold to be recognized as SPIE Fellow

Meet CNSE Assistant VP of Advanced Technology and Business Development, Warren Montgomery, at SPIE 2013 Advanced Lithography.
Contact him at
[email protected].

Albany, NY – Continuing to support the vision and leadership of Governor Andrew Cuomo through which New York is being transformed into the worldwide epicenter for nanotechnology, the SUNY College of Nanoscale Science and Engineering (CNSE) announced today that pioneering scientific research conducted at CNSE’s Albany NanoTech Complex has contributed to nearly 50 technical papers being presented at the world’s preeminent lithography conference.
“As further testimony to Governor Andrew Cuomo’s strategic blueprint that is establishing New York as the leading global hub for high-tech innovation and manufacturing, CNSE is delighted to showcase the industry-leading research capabilities at its world-class Albany NanoTech Complex as part of the world’s foremost lithography conference,” said CNSE Executive Vice President of Innovation and Technology and Vice President for Research Dr. Michael Liehr. “The papers presented by CNSE’s faculty and researchers, along with its global corporate partners, highlight the success of this unique public-private model in shattering scientific boundaries and driving critical advances to meet the needs of industry.”
The research conducted at CNSE to be featured at the SPIE 2013 Advanced Lithography conference is the culmination of efforts by both CNSE scientists and the college’s global corporate partners, including a number of papers that showcase joint research resulting from the NanoCollege’s unique collaborative partnerships. Presenting corporate partners include IBM, GLOBALFOUNDRIES, SEMATECH, Applied Materials, Tokyo Electron and Vistec Lithography.
Forum papers focus on a variety of research topics that are critical to moving the nanoelectronics industry forward and overcoming technical challenges, including extreme ultraviolet (EUV) micro-exposure tool use at CNSE; EUV photoresist development and imaging; EUV mask blank fabrication; outgassing effects in EUV photoresist; eBeam, X-ray, and optical metrology techniques; directed self-assembly used in finFET fabrication; phase defect detection in EUV mask blanks; phase shift focus monitors; KrF hybrid photo resist development; LER measurement and mitigation; multilayer deposition techniques for EUV mask blanks; resolution improvement using pupil filtering in EUV lithography; the out-of-band illumination effect on EUV lithography; and EUV mask inspection techniques.
Also at the conference, SPIE will officially recognize CNSE Empire Innovation Professor of Nanoscale Science Dr. AlainDiebold as an SPIE Fellow. He is one of only 69 members of distinction to earn the honor in 2013, which highlights technical achievements and service to the general optics community, as well as service to the society.

Dr. Diebold and
SPIE President Bill Arnold

Photo Courtesy:
Muthinti and Dr. Brian Trafas,
Chief Marketing Officer of KLA-Tencor

Photo Courtesy: SPIE

Additionally, CNSE graduate student Gangadhara Raja Muthinti, who is advised by Dr.Diebold, has won the award for Best Student Paper at the SPIE Conference Metrology, Inspection, and Process Control for Microlithography XXVII. A panel of judges from academia, industry, and government honored him during a ceremony for his research paper, “Mueller-based scatterometry measurement of nanoscale structures with anisotropic in-plane optical properties,” based on technical merit and presentation quality. Muthinti, who is from Vishakapatnam, India, is currently studying Nanoscale Engineering at CNSE.
Known as the world’s leading nanoelectronics lithography conference and exhibition, the 39th annual SPIE Advanced Lithography conference is being held February 24 through 28 in California at the San Jose Convention Center and San Jose Marriott.
For more information on the conference, visit http://spie.org/x10942.xml.


About CNSE. The UAlbany CNSE is the first college in the world dedicated to education, research, development and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience and nanoeconomics. With more than $14 billion in high-tech investments, CNSE represents the world’s most advanced university-driven research enterprise, offering students a one-of-a-kind academic experience and providing over 300 corporate partners with access to an unmatched ecosystem for leading-edge R&D and commercialization of nanoelectronics and nanotechnology innovations. CNSE’s footprint spans upstate New York, including its Albany NanoTech Complex, an 800,000-square-foot megaplex with the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 85,000 square feet of Class 1 capable cleanrooms. More than 3,100 scientists, researchers, engineers, students and faculty work here, from companies including IBM, Intel, GlobalFoundries, SEMATECH, Samsung, TSMC, Toshiba, Applied Materials, Tokyo Electron, ASML and Lam Research. An expansion now underway, part of which will house the world’s first Global 450mm Consortium, will add nearly 500,000 square feet of next-generation infrastructure, an additional 50,000 square feet of Class 1 capable cleanrooms, and more than 1,000 scientists, researchers and engineers from CNSE and global corporations. In addition, CNSE’s Solar Energy Development Center in Halfmoon provides a prototyping and demonstration line for next-generation CIGS thin-film solar cells, supporting its leadership of the U.S. Photovoltaic Manufacturing Consortium (PVMC). CNSE’s Smart System Technology and Commercialization Center of Excellence (STC) in Rochester offers state-of-the-art capabilities for MEMS fabrication and packaging. CNSE also co-founded and manages operations at the Computer Chip Commercialization Center at SUNYIT in Utica and is a co-founder of the Nanotechnology Innovation and Commercialization Excelerator in Syracuse. For information, visit www.cnse.albany.edu.


Media Contact:

Steve Janack, CNSE Vice President for Marketing and Communications
(518) 956-7322 | [email protected]